A novel equivalent circuit model for two-layered spiral inductor with eddy-current effect in the substrate

Abstract

In this paper, an improved two-layered spiral inductor lumped-element circuit model, which takes into account the effect of eddy current within the silicon substrate, is proposed. Physical explanation on the modifications of the circuit is given. Compared to the conventional model, our proposed model provides better agreement between the simulated and measured responses for a sample of circular spiral inductors fabricated using silicon substrate. © 2004 Wiley Periodicals, Inc.