Please use this identifier to cite or link to this item: https://doi.org/10.1088/0960-1317/18/2/025023
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dc.titleA micromachined stationary lamellar grating interferometer for Fourier transform spectroscopy
dc.contributor.authorChau, F.S.
dc.contributor.authorDu, Y.
dc.contributor.authorZhou, G.
dc.date.accessioned2014-06-16T09:30:34Z
dc.date.available2014-06-16T09:30:34Z
dc.date.issued2008-02-01
dc.identifier.citationChau, F.S., Du, Y., Zhou, G. (2008-02-01). A micromachined stationary lamellar grating interferometer for Fourier transform spectroscopy. Journal of Micromechanics and Microengineering 18 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/18/2/025023
dc.identifier.issn09601317
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/54383
dc.description.abstractThis paper reports a novel micromachined stationary lamellar grating interferometer for Fourier transform (FT) based spectroscopy applications. The interferometer employs a set of tilted interdigitated light reflecting beams to produce an interferogram with spatially varying optical path difference (OPD) recorded by a line photodetector array. Due to the advantages including robustness and the absence of mechanical moving parts and optical beam splitters, the proposed spectrometer may be built in a relatively small volume and with moderate cost for wide-band radiation spectra measurement, fast time-resolved spectroscopy and for field use. The proposed stationary lamellar grating FT spectrometer was implemented using a silicon-on-insulator (SOI) micromachining process. The prototype spectrometer demonstrated a full width at half maximum (FWHM) spectral resolution of 2 nm at a wavelength of 532 nm and of 2.6 nm at 632.8 nm. © 2008 IOP Publishing Ltd.
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1088/0960-1317/18/2/025023
dc.description.sourcetitleJournal of Micromechanics and Microengineering
dc.description.volume18
dc.description.issue2
dc.description.page-
dc.description.codenJMMIE
dc.identifier.isiut000252966100023
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