Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2011.04.007
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dc.titleA 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner
dc.contributor.authorDu, Y.
dc.contributor.authorZhou, G.
dc.contributor.authorCheo, K.K.L.
dc.contributor.authorZhang, Q.
dc.contributor.authorFeng, H.
dc.contributor.authorChau, F.S.
dc.date.accessioned2014-06-16T09:23:12Z
dc.date.available2014-06-16T09:23:12Z
dc.date.issued2011-08-10
dc.identifier.citationDu, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2011-08-10). A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner. Sensors and Actuators, A: Physical 168 (2) : 253-261. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2011.04.007
dc.identifier.issn09244247
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/53883
dc.description.abstractThis article presents a 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner with an improved grating platform. Detailed optical characterizations of the prototype scanner is measured and reported. The scanner is capable of scanning a laser beam at about 21.5 kHz. The optical resolution of the prototype scanner is measured to be 916 pixels per-unidirectional-scan while scanning in atmosphere. While scanning in vacuum condition, the optical resolution can be estimated to be 1460 pixels per-unidirectional-scan, which is suitable for SXGA (1280 × 1024) resolution scanned beam displays. © 2011 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.sna.2011.04.007
dc.sourceScopus
dc.subjectDiffraction grating
dc.subjectMicro scanners
dc.subjectMicro-opto- electromechanical systems (MOEMS)
dc.subjectMicro-resonators
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1016/j.sna.2011.04.007
dc.description.sourcetitleSensors and Actuators, A: Physical
dc.description.volume168
dc.description.issue2
dc.description.page253-261
dc.description.codenSAAPE
dc.identifier.isiut000291905200004
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