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Please use this identifier to cite or link to this item: https://doi.org/10.1002/adma.200305185
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dc.titleNanoporous Ultra-Low-κ Films Prepared from Fluorinated Polyimide with Grafted Poly(acrylic acid) Side Chains
dc.contributor.authorWang, W.-C.
dc.contributor.authorVora, R.H.
dc.contributor.authorKang, E.-T.
dc.contributor.authorNeoh, K.-G.
dc.contributor.authorOng, C.-K.
dc.contributor.authorChen, L.-F.
dc.date.accessioned2014-04-25T09:04:45Z
dc.date.available2014-04-25T09:04:45Z
dc.date.issued2004-01-05
dc.identifier.citationWang, W.-C., Vora, R.H., Kang, E.-T., Neoh, K.-G., Ong, C.-K., Chen, L.-F. (2004-01-05). Nanoporous Ultra-Low-κ Films Prepared from Fluorinated Polyimide with Grafted Poly(acrylic acid) Side Chains. Advanced Materials 16 (1) : 54-57. ScholarBank@NUS Repository. https://doi.org/10.1002/adma.200305185
dc.identifier.issn09359648
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/51796
dc.description.abstractThermal decomposition of the fluorinated polyimide with grafted poly(acrylic acid) side chain was discussed. Thermal stability, low moisture absorption and good adhesion to semiconductors and metals were also studied. Density measurements were also used to characterize the porosity of the films. It was found that the dielectric constant of the nanoporous FPI films can be varied by varying the grafted concentration of the labile side chains.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1002/adma.200305185
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentCHEMICAL & BIOMOLECULAR ENGINEERING
dc.contributor.departmentPHYSICS
dc.contributor.departmentTEMASEK LABORATORIES
dc.contributor.departmentMATERIALS SCIENCE
dc.description.doi10.1002/adma.200305185
dc.description.sourcetitleAdvanced Materials
dc.description.volume16
dc.description.issue1
dc.description.page54-57
dc.description.codenADVME
dc.identifier.isiut000188702500010
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