A variation of local point interpolation method (vLPIM) for analysis of microelectromechanical systems (MEMS) device

Abstract

In this paper, a variation of local point interpolation method (vLPIM) is presented for meshless analysis of microelectromechanical systems (MEMS) devices, in which the weight function is assigned by high-order spline functions, instead of the Galerkin formulation of the local point interpolation method (LPIM). The present vLPIM with Timoshenko beam theory are then used to analyze MEMS. In the conventional MEMS design and simulation, time-consuming mesh generation is required. Recently, a number of meshless techniques have been applied to MEMS simulations since they do not require mesh generation. As one of them, the LPIM is based on the local weak form of the partial differential equations and easily implements the boundary conditions due to the shape functions constructed by the PIM with the delta function properties. Several MEMS devices are studied by the present vLPIM. The simulated results are compared with those by other simulation approaches, and it is shown that the present meshless method is very efficient and accurate for the analysis of MEMS devices. © 2004 Elsevier Ltd. All rights reserved.