Surface micromachined pressure sensing structures with biocompatible interface

Abstract

Surface micromachined poly-Si pressure-sensing structures with biocompatible interfaces were developed for therapy of temporomandibular disorder (TMD). These structures made use of poly-Si suspended bridges, modified bridges with etching holes, and crossing bridges as flexible capacitor plates. Two biocompatible materials were considered as the interfaces between the pressure-sensing structures and the tooth. Optimization and testing were conducted on different sensor schemes, and the measurements were compared with the simulation results. Compared with conventional methods, this microsensor enables the continuous monitoring of the grinding activities of TMD patients and is less injurious to the patients.