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https://doi.org/10.1117/12.462859
DC Field | Value | |
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dc.title | A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers | |
dc.contributor.author | Logeeswaran, V.J. | |
dc.contributor.author | Tay, F.E.H. | |
dc.contributor.author | Chan, M.L. | |
dc.contributor.author | Chau, F.S. | |
dc.contributor.author | Liang, Y.C. | |
dc.date.accessioned | 2014-04-24T07:18:50Z | |
dc.date.available | 2014-04-24T07:18:50Z | |
dc.date.issued | 2002 | |
dc.identifier.citation | Logeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C. (2002). A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers. Proceedings of SPIE - The International Society for Optical Engineering 4755 : 584-593. ScholarBank@NUS Repository. https://doi.org/10.1117/12.462859 | |
dc.identifier.issn | 0277786X | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/50836 | |
dc.description.abstract | In this paper, the response to the first harmonic component (2f) of the electrostatic force in single terminal driven electrostatic comb-drive and parallel-plate drive was used as a signal to extract device parameters, namely, the Q-factor and resonant frequency instead of the fundamental (1f) resonance response. It is shown that the difficulty in motional measurement due to electrical cross-talk (parasitics) using 1f measurement can be overcome with a higher signal-tonoise ratio of the 2f signal. Both atmospheric (low-Q) and reduced pressure environment were investigated using offchip electronics and lock-in amplifier. The measurements were done on the electrostatic comb-drive and capacitive parallel plate sensing plates that form the two core modules of a yaw rate sensor (dual-axis resonator). The effects of AC and DC bias voltages on the measured response have been investigated. Experimental amplitude and phase response data have been analysed using the Lorentzian curve-fit, Resonance Curve Area (RCA) method, the half-power bandwidth method (3dB) and the Nyquist plot for data fitting and determination of the Q-factor and resonance frequency. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.462859 | |
dc.source | Scopus | |
dc.subject | Electrostatic drive | |
dc.subject | First harmonic (2f) | |
dc.subject | Lock-in | |
dc.subject | Lorentzian curve-fitting | |
dc.subject | Resonance Curve Area (RCA) | |
dc.type | Article | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1117/12.462859 | |
dc.description.sourcetitle | Proceedings of SPIE - The International Society for Optical Engineering | |
dc.description.volume | 4755 | |
dc.description.page | 584-593 | |
dc.description.coden | PSISD | |
dc.identifier.isiut | 000176995300067 | |
Appears in Collections: | Staff Publications |
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