Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.462859
DC FieldValue
dc.titleA 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers
dc.contributor.authorLogeeswaran, V.J.
dc.contributor.authorTay, F.E.H.
dc.contributor.authorChan, M.L.
dc.contributor.authorChau, F.S.
dc.contributor.authorLiang, Y.C.
dc.date.accessioned2014-04-24T07:18:50Z
dc.date.available2014-04-24T07:18:50Z
dc.date.issued2002
dc.identifier.citationLogeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C. (2002). A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers. Proceedings of SPIE - The International Society for Optical Engineering 4755 : 584-593. ScholarBank@NUS Repository. https://doi.org/10.1117/12.462859
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/50836
dc.description.abstractIn this paper, the response to the first harmonic component (2f) of the electrostatic force in single terminal driven electrostatic comb-drive and parallel-plate drive was used as a signal to extract device parameters, namely, the Q-factor and resonant frequency instead of the fundamental (1f) resonance response. It is shown that the difficulty in motional measurement due to electrical cross-talk (parasitics) using 1f measurement can be overcome with a higher signal-tonoise ratio of the 2f signal. Both atmospheric (low-Q) and reduced pressure environment were investigated using offchip electronics and lock-in amplifier. The measurements were done on the electrostatic comb-drive and capacitive parallel plate sensing plates that form the two core modules of a yaw rate sensor (dual-axis resonator). The effects of AC and DC bias voltages on the measured response have been investigated. Experimental amplitude and phase response data have been analysed using the Lorentzian curve-fit, Resonance Curve Area (RCA) method, the half-power bandwidth method (3dB) and the Nyquist plot for data fitting and determination of the Q-factor and resonance frequency.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.462859
dc.sourceScopus
dc.subjectElectrostatic drive
dc.subjectFirst harmonic (2f)
dc.subjectLock-in
dc.subjectLorentzian curve-fitting
dc.subjectResonance Curve Area (RCA)
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1117/12.462859
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume4755
dc.description.page584-593
dc.description.codenPSISD
dc.identifier.isiut000176995300067
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.