Cathodoluminescence detector

Abstract

A cathodoluminescence detector (11) for the vacuum chamber specimen stage of an electron microscope comprises a base member adaptor element (27) with threaded stub (30) to connect with the microscope specimen stage (not shown here), and supporting specimen (14) on support (15) mounted on threaded boss part (27a) of element (27). Boss (27a) is secured with a planar support (21) which carries an annular photosensitive member (19) with interposed insulant layer (22) and connections (24). A parabolic reflector (16) is located over member (19) and includes aperture (18) for passage of electron beam (13). The polished concave reflective surface (17) of reflector (16) reflects radiation emitted from specimen (14) to member (19) and absorbs backscattered electrons from the specimen (14).