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Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/32771
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dc.titleCapacitive pressure sensor with a cantilever member
dc.contributor.authorTAN, WOEI WAN
dc.contributor.authorGE, PEI
dc.contributor.authorTAY, ENG HOCK FRANCIS
dc.contributor.authorPHANG, JYH SIONG
dc.date.accessioned2012-05-02T02:30:10Z
dc.date.available2012-05-02T02:30:10Z
dc.date.issued2009-01-20
dc.identifier.citationTAN, WOEI WAN,GE, PEI,TAY, ENG HOCK FRANCIS,PHANG, JYH SIONG (2009-01-20). Capacitive pressure sensor with a cantilever member. ScholarBank@NUS Repository.
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/32771
dc.description.abstractA capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm member and supported on a support structure, wherein the base member and the cantilever member form a capacitor structure of the device and wherein deflection of the diaphragm member beyond a threshold value causes the cantilever member to deflect to cause a capacitive change in the capacitor structure.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/http://analytics.patsnap.com/patent_view/view?pn=US7478559
dc.sourcePatSnap
dc.typePatent
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.departmentMECHANICAL ENGINEERING
dc.identifier.isiutNOT_IN_WOS
dc.description.patentnoUS7478559
dc.description.patenttypeGranted Patent
dc.contributor.patentassigneeNATIONAL UNIVERSITY OF SINGAPORE
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