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Title: | ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY | Authors: | CHEAH CHEE LIANG | ORCID iD: | orcid.org/0009-0005-6527-3899 | Keywords: | 3D NAND; Micron; High Stress; Thermal Stability | Issue Date: | 22-Dec-2022 | Citation: | CHEAH CHEE LIANG (2022-12-22). ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY. ScholarBank@NUS Repository. | URI: | https://scholarbank.nus.edu.sg/handle/10635/242997 |
Appears in Collections: | Master's Theses (Closed) |
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