Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/242997
Title: ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY
Authors: CHEAH CHEE LIANG
ORCID iD:   orcid.org/0009-0005-6527-3899
Keywords: 3D NAND; Micron; High Stress; Thermal Stability
Issue Date: 22-Dec-2022
Citation: CHEAH CHEE LIANG (2022-12-22). ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY. ScholarBank@NUS Repository.
URI: https://scholarbank.nus.edu.sg/handle/10635/242997
Appears in Collections:Master's Theses (Closed)

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