Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/238649
DC Field | Value | |
---|---|---|
dc.title | DIAMOND FILM GROWTH WITH MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MPCVD) | |
dc.contributor.author | GU JITENG | |
dc.date.accessioned | 2023-03-31T18:01:24Z | |
dc.date.available | 2023-03-31T18:01:24Z | |
dc.date.issued | 2022-08-10 | |
dc.identifier.citation | GU JITENG (2022-08-10). DIAMOND FILM GROWTH WITH MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MPCVD). ScholarBank@NUS Repository. | |
dc.identifier.uri | https://scholarbank.nus.edu.sg/handle/10635/238649 | |
dc.description.abstract | The growth of large area nanocrystalline diamond (NCD) film is of industrial interests because of their potential applications as hard mask. Here, we proposed “dry-seeding” methods to produce diamond grains for subsequent NCD film deposition on wafer-scaled silicon substrate. Owing to the formation of high crystalline diamond grains by “dry-seeding” method, the photochemically induced poly-adamantane, which served as a low-cost and high-density seeding layer, greatly reduced the film residual stress The NCD film grown by another “dry-seeding” method (Bias enhanced nucleation) exhibited ideal optical properties and rendered dynamic structural colors when a periodic array of asymmetric diamond cuboids with high-aspect ratio of ~3.1 was patterned on its surface. Our work demonstrates that the “dry-seeding” method combined with linear antenna MPCVD system can be potentially used for in-line deposition of NCD film mask and growth of high-quality NCD film. | |
dc.language.iso | en | |
dc.subject | NCD, Chemical Precursor, BEN, Dry-seeding, Diamond Metasurface, | |
dc.type | Thesis | |
dc.contributor.department | CHEMISTRY | |
dc.contributor.supervisor | Kian Ping Loh | |
dc.description.degree | Ph.D | |
dc.description.degreeconferred | DOCTOR OF PHILOSOPHY (FOS) | |
dc.identifier.orcid | 0000-0002-4778-4020 | |
Appears in Collections: | Ph.D Theses (Open) |
Show simple item record
Files in This Item:
File | Description | Size | Format | Access Settings | Version | |
---|---|---|---|---|---|---|
Gu Jiteng.pdf | 5.66 MB | Adobe PDF | OPEN | None | View/Download |
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.