Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/226235
Title: STUDY ON 2D GRAPHENE AS THE SENSING FILM OF ISFETS FOR PH SENSING APPLICATIONS
Authors: ZENG ZHE
ORCID iD:   orcid.org/0000-0001-9252-1046
Keywords: ISFET, graphene, 2D, pH, sensor, drift
Issue Date: 30-Sep-2021
Citation: ZENG ZHE (2021-09-30). STUDY ON 2D GRAPHENE AS THE SENSING FILM OF ISFETS FOR PH SENSING APPLICATIONS. ScholarBank@NUS Repository.
Abstract: This work aims to investigate the sensing performances of CVD graphene, develop highly stable graphene-based ISFETs with reduced drift and hysteresis effects and further improve the sensing performance by applying plasma treatments on graphene. The advantage of graphene is its robust honeycomb ring structure formed by tightly bonded sp2 carbons, which makes it a super barrier against diffusion species like water. This property addresses the stability issues of ISFETs, which are mainly caused by the slow penetration of water and water-related species into the gate oxide. As a result, graphene-based ISFETs exhibit low drift rates below 1 mV/hr, and small hysteresis widths within 3.4 mV. Meanwhile, the sensitivity can be tuned by surface plasma treatments like O2, reaching up to 40 mV/pH. The final demonstration of a reference-less ISFET shows a drift rate as low as 0.38mV/hr, indicating the unlimited potentials for future graphene-based ISFETs.
URI: https://scholarbank.nus.edu.sg/handle/10635/226235
Appears in Collections:Ph.D Theses (Open)

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