Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/153971
Title: A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING
Authors: HE LIWEI
Keywords: predictive maintenance
semiconductor manufacturing
maintenance strategy
data mining
multiple regression model
Issue Date: 2010
Citation: HE LIWEI (2010). A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING. ScholarBank@NUS Repository.
Abstract: Predictive maintenance (PdM) refers to the practice of regular monitoring of the operating condition of machines, estimating the future probability of failure, and/or projecting rate of machine degradation based on current and past equipment/process conditions, and scheduling maintenance actions just before they are required. With the successful implementation examples of PdM in other industries like chemical processing and aerospace to reduce the number and costs of unscheduled machine breakdown, this project aims to perform a pilot implement study of PdM in semiconductor industry. Based on the existing manufacturing system in the hosting company and the standard framework of PdM, this thesis proposed the approaches to implement PdM there, and developed models to extract features related to machine breakdown in the monitoring system, to estimate the probability of failure, and to project the time when machine failure happens. By model validation on the historical data under consideration, quite satisfying results were achieved.
URI: https://scholarbank.nus.edu.sg/handle/10635/153971
Appears in Collections:Master's Theses (Restricted)

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
He Liwei_He_Liwei_SMA_CE_DM_thesis.pdf434.64 kBAdobe PDF

RESTRICTED

NoneLog In

Page view(s)

5
checked on Jul 10, 2020

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.