Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/153903
Title: DEVELOPING A FAST IMAGING ALGORITHM USING DECOMPOSITION METHODS
Authors: CHEN AO
Keywords: Aerial Image Computation
Geometrical Diffraction Theory
VDER
Optical Proximity Correction
Mercer Expansion
Tcl/Tk
Issue Date: 2003
Citation: CHEN AO (2003). DEVELOPING A FAST IMAGING ALGORITHM USING DECOMPOSITION METHODS. ScholarBank@NUS Repository.
Abstract: Aerial image computation has become a crucial component for Optical Proximity Correction (OPC) in microlithography. The currently used partially coherent illumination has caused intensive computation and inadequate speed. Based on the newly-developed VDER technique, a fast imaging algorithm is described using decomposition methods in the spatial domain. Truncations of the expansion employed leads to great computational advantages. Examples are then presented in which GDS masks are loaded and aerial image profiles are computed and displayed for given illumination and projection system parameters. The proposed algorithm proves to be fast and viable.
URI: https://scholarbank.nus.edu.sg/handle/10635/153903
Appears in Collections:Master's Theses (Restricted)

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