ROBUST ADAPTIVE CONTROL OF HIGH PRECISION MECHATRONIC SYSTEMS

Abstract

As the next generation electronic devices begin to require ever more complex manufacturing processes, the industry requires advancements in both mechatronics and critical underlying control algorithms. In an effort to improve both machine and algorithm aspects, the work presented in herein is a collaboration between the NUS Graduate School for Integrative Sciences and Engineering, the National University of Singapore and the Singapore Institute of Manufacturing Technology, a division of the Agency for Science, Technology and Research. This works presents adaptive robust control strategies for rotary and planar motion actuators with a strong view of limiting vibration caused by high frequency robust action.