Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.physleta.2014.12.007
| DC Field | Value | |
|---|---|---|
| dc.title | X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy | |
| dc.contributor.author | Kalaiselvi, Shenbaga M. P. | |
| dc.contributor.author | Tan, Augustine Tuck Lee | |
| dc.contributor.author | Talebitaher, Alireza R. | |
| dc.contributor.author | Lee, Paul | |
| dc.contributor.author | Heussler, Sascha Pierre | |
| dc.contributor.author | Breese, Mark Brian H. | |
| dc.contributor.author | Rawat, Rajdeepsingh | |
| dc.date.accessioned | 2016-04-29T08:30:59Z | |
| dc.date.available | 2016-04-29T08:30:59Z | |
| dc.date.issued | 2015 | |
| dc.identifier.citation | Kalaiselvi, Shenbaga M. P., Tan, Augustine Tuck Lee, Talebitaher, Alireza R., Lee, Paul, Heussler, Sascha Pierre, Breese, Mark Brian H., Rawat, Rajdeepsingh (2015). X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy. Physics Letters, Section A: General, Atomic and Solid State Physics 379 (6) : 560-569. ScholarBank@NUS Repository. https://doi.org/10.1016/j.physleta.2014.12.007 | |
| dc.identifier.issn | 03759601 | |
| dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/123571 | |
| dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.physleta.2014.12.007 | |
| dc.publisher | Elsevier | |
| dc.type | Article | |
| dc.contributor.department | SINGAPORE SYNCHROTRON LIGHT SOURCE | |
| dc.contributor.department | PHYSICS | |
| dc.description.doi | 10.1016/j.physleta.2014.12.007 | |
| dc.description.sourcetitle | Physics Letters, Section A: General, Atomic and Solid State Physics | |
| dc.description.volume | 379 | |
| dc.description.issue | 6 | |
| dc.description.page | 560-569 | |
| dc.identifier.isiut | 000349586000009 | |
| dc.published.state | published | |
| Appears in Collections: | Staff Publications | |
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