1. ScholarBank@NUS
  2. 1. Staff
  3. Staff Publications
Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0038-1101(03)00008-X
DC FieldValue
dc.titleEffects of first rapid thermal annealing temperature on Co silicide formation
dc.contributor.authorPeng, H.J.
dc.contributor.authorShen, Z.X.
dc.contributor.authorLim, E.H.
dc.contributor.authorLai, C.W.
dc.contributor.authorLiu, R.
dc.contributor.authorWee, A.T.S.
dc.contributor.authorSameer, A.
dc.contributor.authorDai, J.Y.
dc.contributor.authorZhang, B.C.
dc.contributor.authorZheng, J.Z.
dc.date.accessioned2014-12-12T07:48:20Z
dc.date.available2014-12-12T07:48:20Z
dc.date.issued2003-08
dc.identifier.citationPeng, H.J., Shen, Z.X., Lim, E.H., Lai, C.W., Liu, R., Wee, A.T.S., Sameer, A., Dai, J.Y., Zhang, B.C., Zheng, J.Z. (2003-08). Effects of first rapid thermal annealing temperature on Co silicide formation. Solid-State Electronics 47 (8) : 1249-1253. ScholarBank@NUS Repository. https://doi.org/10.1016/S0038-1101(03)00008-X
dc.identifier.issn00381101
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/116312
dc.description.abstractCobalt silicide formation has been shown to be improved by a reactive Ti capping layer. We investigated the effects of the first rapid thermal anneal (RTA1) temperature on the silicidation mechanism and CoSi2 film properties. It was found that a higher RTA1 temperature results in lower sheet resistance, a smoother CoSi2/Si interface and better film thermal stability. The improved thermal stability may be explained by the smoother CoSi2/Si interface at higher RTA1 temperature. © 2003 Elsevier Science Ltd. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/S0038-1101(03)00008-X
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentINSTITUTE OF ENGINEERING SCIENCE
dc.contributor.departmentPHYSICS
dc.description.doi10.1016/S0038-1101(03)00008-X
dc.description.sourcetitleSolid-State Electronics
dc.description.volume47
dc.description.issue8
dc.description.page1249-1253
dc.description.codenSSELA
dc.identifier.isiut000183226500001
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.