Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/112710
DC FieldValue
dc.titleLaser-Ablation-Induced Concentric Ring Structures
dc.contributor.authorLan, B.
dc.contributor.authorHong, M.-H.
dc.contributor.authorChen, S.-X.
dc.contributor.authorYe, K.-D.
dc.contributor.authorWang, Z.-B.
dc.contributor.authorChen, G.-X.
dc.contributor.authorChong, T.-C.
dc.date.accessioned2014-11-28T06:49:59Z
dc.date.available2014-11-28T06:49:59Z
dc.date.issued2003-08
dc.identifier.citationLan, B.,Hong, M.-H.,Chen, S.-X.,Ye, K.-D.,Wang, Z.-B.,Chen, G.-X.,Chong, T.-C. (2003-08). Laser-Ablation-Induced Concentric Ring Structures. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 42 (8) : 5123-5126. ScholarBank@NUS Repository.
dc.identifier.issn00214922
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/112710
dc.description.abstractFormation of concentric ring structures on substrate surface by 3rd harmonic Nd:YAG laser ablation is investigated. Experiments show that most of the laser energy on the substrate surface is distributed at the center and the outmost ring. Optical microscope and scanning electron microscope (SEM) observations reveal that concentric ring structures are only formed on the substrate surface at the positions between the focus plane and the lens. Both the outmost ring diameter and the ring number increase with the defocus distance, however, they are not dependent on laser fluence. This phenomenon could be attributed to the lens pupil truncation and its aberration. Laser energy concentrated at the outmost ring can be used to punch via microholes with the diameter determined by the defocus distance. This technique provides a high-speed, high-efficiency manufacturing method for via microhole array fabrication with low-energy laser ablation.
dc.sourceScopus
dc.subjectDiffraction rings
dc.subjectLaser ablation
dc.subjectSpherical aberration
dc.subjectTruncated Gaussian beam
dc.subjectVia microhole drilling
dc.typeArticle
dc.contributor.departmentDATA STORAGE INSTITUTE
dc.description.sourcetitleJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
dc.description.volume42
dc.description.issue8
dc.description.page5123-5126
dc.description.codenJAPND
dc.identifier.isiutNOT_IN_WOS
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.