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Title: A surface chemistry route to molybdenum sulfide and germanide films using the single-source precursor tetrakis(diethylaminodithiocarbomato)molybdate(IV)
Authors: Ouyang, T.
Loh, K.P. 
Zhang, H. 
Vittal, J.J. 
Vetrichelvan, M. 
Chen, W. 
Gao, X. 
Wee, A.T.S. 
Issue Date: 11-Nov-2004
Citation: Ouyang, T., Loh, K.P., Zhang, H., Vittal, J.J., Vetrichelvan, M., Chen, W., Gao, X., Wee, A.T.S. (2004-11-11). A surface chemistry route to molybdenum sulfide and germanide films using the single-source precursor tetrakis(diethylaminodithiocarbomato)molybdate(IV). Journal of Physical Chemistry B 108 (45) : 17537-17545. ScholarBank@NUS Repository.
Abstract: We report for the first time the direct deposition of crystalline molybdenum sulfide (MoS 2) using a single-source precursor based on tetrakis(diethylaminodithiocarbomato)molybdate(IV) (abbreviated as Mo(Et 2NCS 2) 4). The chemistry of this precursor adsorbed on a range of substrates (silicon, germanium, gold-coated germanium, nickel, etc.) has been studied using in situ X-ray photoelectron spectroscopy. The Mo(Et 2NCS 2) 4 precursor can be evaporated at 300 °C; its vapor adsorbs on most surfaces at room temperature and decomposes by 400 °C to form crystalline MoS 2. Using this method, high-quality, basal plane-oriented MoS 2 can be grown on nickel by a one-step thermal evaporation process for the first time. Interestingly, choosing elemental substrates which form eutectic alloys with gold favors the elimination of sulfur from the MoS 2 film. This results in Mo intermetallic compound formation at the eutectic temperatures of the Au and substrate element. Unpredecented low-temperature growth of tetragonal MoSi 2 or orthorhombic MoGe 2 on Au-coated silicon or germanium, respectively, has been obtained via this eutectic phase-mediated diffusional reaction. Hollow carbon nanofibers are produced if the precursor is dosed onto Au-Si substrate at 1000 °C, mediated by the catalytic effect of Au-Mo.
Source Title: Journal of Physical Chemistry B
ISSN: 15206106
DOI: 10.1021/jp0470647
Appears in Collections:Staff Publications

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