Woei Wan Tan

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Full Name

Woei Wan Tan

Variants

Wan Tan, Woei
Woei Wan Tan
Wan, T.W.
TAN, WOEI WAN
Tan, W.
Tan, W.-W.
Tan, W.W.
Wan Tan, W.
Tan W.W

Main Affiliation

SCHOOL OF CONTINUING AND LIFELONG EDUCATION

Faculty

FAC OF ENGINEERING
SCHOOL OF CONTINUING & LIFELONG EDN

sletanww@nus.edu.sg

Other emails

sletanww@nus.edu.sg
eletanww@nus.edu.sg

Refined By:

Subject: In-situ temperature measurement

Department: ELECTRICAL & COMPUTER ENGINEERING

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	Issue Date	Title	Author(s)
1	Aug-2003	An in-situ temperature measurement system for DUV lithography	Tan, W.W. ; Li, R.F.Y.
2	2002	An in-situ temperature measurement system for DUV lithography	Tan, W.W. ; Zhang, J.
3	Feb-2008	RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing	Tan, W.W. ; Li, R.F.Y.; Loh, A.P. ; Ho, W.K.
4	2001	Towards an intelligent in-line temperature measurement system for semiconductor manufacturing	Tan, W.W. ; Zhang, J.; Loh, A.P.