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Tung, Chih-Hang
rp01242
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Full Name
Tung, Chih-Hang
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Tung, Chih Hang
Tung, C.-H.
Tung, C.H.
Main Affiliation
INSTITUTE OF MICROELECTRONICS
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NON-NUS ORGANISATIONS
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Author
1
Babu, Premila
1
Chu, Paul K.
1
Han, Taejoon
1
Lau, Wai Shing
1
Ow, Aik Keong
.
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Department
1
ELECTRICAL AND COMPUTER ENGINEERING
1
INSTITUTE OF MICROELECTRONICS
Type
1
Article
Date Issued
1
1998
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ELECTRICAL ENGINEERING
Date Issued:
[1990 TO 1999]
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Title
Author(s)
1
1998
Superiority of N2O plasma annealing over O2 plasma annealing for amorphous tantalum pentoxide (Ta2O5) films
Lau, Wai Shing
;
Perera, Merinnage Tamara Chandima
;
Babu, Premila
;
Ow, Aik Keong
;
Han, Taejoon
;
Sandler, Nathan P.
;
Tung, Chih Hang
;
Sheng, Tan Tsu
;
Chu, Paul K.
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