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Title: The new Surrey ion beam analysis facility
Authors: Simon, A.
Jeynes, C.
Webb, R.P.
Finnis, R.
Tabatabaian, Z.
Sellin, P.J.
Breese, M.B.H. 
Fellows, D.F.
Van den Broek, R.
Gwilliam, R.M.
Issue Date: Jun-2004
Citation: Simon, A., Jeynes, C., Webb, R.P., Finnis, R., Tabatabaian, Z., Sellin, P.J., Breese, M.B.H., Fellows, D.F., Van den Broek, R., Gwilliam, R.M. (2004-06). The new Surrey ion beam analysis facility. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 219-220 (1-4) : 405-409. ScholarBank@NUS Repository.
Abstract: We present the characteristics of an ion beam analysis facility based on a fully computer controlled 2 MV Tandetron TM commissioned in 2002. The terminal voltage temperature stability is measured using the 3036 keV 16O(α,α) 16O resonance. A microbeam beamline with an Oxford triplet lens and a coolable sample holder has been built. We report new temperature dependent time-resolved IBIC measurements from CZT detectors that illustrate the capability of the system. A millibeam beamline has been built with a 6-axis goniometer capable of handling 100 mm wafers through an airlock with a z-axis for the precise location of the sample surface at the eucentric point. This instrument is designed for routine RBS/ERD and channelling applications, and incorporates a versatile controller capable of fully automated data collection. © 2004 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ISSN: 0168583X
DOI: 10.1016/j.nimb.2004.01.091
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