The new Surrey ion beam analysis facility

Abstract

We present the characteristics of an ion beam analysis facility based on a fully computer controlled 2 MV Tandetron TM commissioned in 2002. The terminal voltage temperature stability is measured using the 3036 keV 16O(α,α) 16O resonance. A microbeam beamline with an Oxford triplet lens and a coolable sample holder has been built. We report new temperature dependent time-resolved IBIC measurements from CZT detectors that illustrate the capability of the system. A millibeam beamline has been built with a 6-axis goniometer capable of handling 100 mm wafers through an airlock with a z-axis for the precise location of the sample surface at the eucentric point. This instrument is designed for routine RBS/ERD and channelling applications, and incorporates a versatile controller capable of fully automated data collection. © 2004 Elsevier B.V. All rights reserved.