Please use this identifier to cite or link to this item: https://doi.org/10.1109/EDSSC.2007.4450216
Title: Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy
Authors: Wang, Y.
Zhang, D.H.
Huang, Z.M.
Liu, W.
Li, J.H.
Liu, C.J. 
Wee, A.T.S. 
Issue Date: 2007
Citation: Wang, Y., Zhang, D.H., Huang, Z.M., Liu, W., Li, J.H., Liu, C.J., Wee, A.T.S. (2007). Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy. IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007 : 677-680. ScholarBank@NUS Repository. https://doi.org/10.1109/EDSSC.2007.4450216
Abstract: Due to the band anti-crossing effect by the high-lying nitrogen (N) resonant state, the InSbN alloys show markedly smaller energy bad gap. This, together with their long Auger life, makes the alloys the best candidate for long wavelength infrared. We have fabricated a set of InSbN alloys by directly nitrogen implantation into the InSb substrate and characterize them with various facilities after annealing at different temperatures for different periods of time. The Secondary Ion Mass Spectrometry indicates that nitrogen atoms in the InSbN alloys are not stable but diffuse significantly. The projected range Rp in the Fick's second law is modified to be Rp = ∂t, where ∂ is a constant value which depends on the material condition and the annealing temperature. The diffusion coefficient is determined by fitting the concentration profiles and it can be described by an exponential relation with a constant D0 of 10-10 cm2/m and an activation energy of 0.55 eV, indicating an interstitial dominant diffusion process. A dominant tendency for surface nitrogen build-up was observed. © 2007 IEEE.
Source Title: IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007
URI: http://scholarbank.nus.edu.sg/handle/10635/98904
ISBN: 1424406374
DOI: 10.1109/EDSSC.2007.4450216
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

19
checked on Mar 12, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.