Focusing of MeV ion beams by means of tapered glass capillary optics

Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.1597889

Title:	Focusing of MeV ion beams by means of tapered glass capillary optics
Authors:	Nebiki, T. Yamamoto, T. Narusawa, T. Breese, M.B.H. Teo, E.J. Watt, F.
Issue Date:	Sep-2003
Citation:	Nebiki, T., Yamamoto, T., Narusawa, T., Breese, M.B.H., Teo, E.J., Watt, F. (2003-09). Focusing of MeV ion beams by means of tapered glass capillary optics. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 21 (5) : 1671-1674. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1597889
Abstract:	The focusing of MeV ion beams by means of tapered glass capillary optics was discussed. It is found that majority of incident ions were lost by the dechanneling or large-angle scattering process and about 1% more or less was emitted through the outlet without significant energy loss. The analysis showed that when the ion species were extended to heavier elements, the method provided versatile maskless ion implantation techniques.
Source Title:	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
URI:	http://scholarbank.nus.edu.sg/handle/10635/98721
ISSN:	07342101
DOI:	10.1116/1.1597889
Appears in Collections:	Staff Publications

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