Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling

Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.1368680

Title:	Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling
Authors:	Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A.
Issue Date:	May-2001
Citation:	Ng, C.M., Wee, A.T.S., Huan, C.H.A., See, A. (2001-05). Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 19 (3) : 829-835. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1368680
Abstract:	The effect of oxygen flooding during ultrashallow depth profiling using secondary ion mass spectrometry (SIMS) was studied on a silicon sample. A direct correlation between the oxidation states of the crater surface and the corresponding surface roughness was also proposed. The results showed that the surface roughening appears to be suppressed under higher oxygen partial pressure, and is related to the nature of the oxide formed.
Source Title:	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
URI:	http://scholarbank.nus.edu.sg/handle/10635/98687
ISSN:	10711023
DOI:	10.1116/1.1368680
Appears in Collections:	Staff Publications

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