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|Title:||Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling|
|Citation:||Ng, C.M., Wee, A.T.S., Huan, C.H.A., See, A. (2001-05). Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 19 (3) : 829-835. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1368680|
|Abstract:||The effect of oxygen flooding during ultrashallow depth profiling using secondary ion mass spectrometry (SIMS) was studied on a silicon sample. A direct correlation between the oxidation states of the crater surface and the corresponding surface roughness was also proposed. The results showed that the surface roughening appears to be suppressed under higher oxygen partial pressure, and is related to the nature of the oxide formed.|
|Source Title:||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Appears in Collections:||Staff Publications|
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