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|Title:||Vacuum pump coaxial probe system for measurement of dielectric properties of materials with smooth surfaces|
|Citation:||Ding, X.Z., Taijing, Lu, Ong, C.K., Tan, B.T.G. (1995-03). Vacuum pump coaxial probe system for measurement of dielectric properties of materials with smooth surfaces. Measurement Science and Technology 6 (3) : 281-282. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/6/3/004|
|Abstract:||A technique for measuring dielectric properties of materials using a coaxial probe is presented. It aims to overcome the error due to air gap between the probe and the sample. By pumping out air between the probe and the sample, a more accurate measurement result can be obtained. The technique is experimentally verified by measuring the dielectric properties of cz-Si crystals and is shown to be accurate, convenient, non-destructive and non-contaminating.|
|Source Title:||Measurement Science and Technology|
|Appears in Collections:||Staff Publications|
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