Vacuum pump coaxial probe system for measurement of dielectric properties of materials with smooth surfaces

Please use this identifier to cite or link to this item: https://doi.org/10.1088/0957-0233/6/3/004

Title:	Vacuum pump coaxial probe system for measurement of dielectric properties of materials with smooth surfaces
Authors:	Ding, X.Z. Taijing, Lu Ong, C.K. Tan, B.T.G.
Issue Date:	Mar-1995
Citation:	Ding, X.Z., Taijing, Lu, Ong, C.K., Tan, B.T.G. (1995-03). Vacuum pump coaxial probe system for measurement of dielectric properties of materials with smooth surfaces. Measurement Science and Technology 6 (3) : 281-282. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/6/3/004
Abstract:	A technique for measuring dielectric properties of materials using a coaxial probe is presented. It aims to overcome the error due to air gap between the probe and the sample. By pumping out air between the probe and the sample, a more accurate measurement result can be obtained. The technique is experimentally verified by measuring the dielectric properties of cz-Si crystals and is shown to be accurate, convenient, non-destructive and non-contaminating.
Source Title:	Measurement Science and Technology
URI:	http://scholarbank.nus.edu.sg/handle/10635/98544
ISSN:	09570233
DOI:	10.1088/0957-0233/6/3/004
Appears in Collections:	Staff Publications

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