Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2011.02.002
Title: Use of a line focus of a quadrupole multiplet for irradiating millimeter length lines
Authors: Xiong, B.Q.
Breese, M.B.H. 
Azimi, S.
Ow, Y.S. 
Teo, E.J. 
Keywords: Long line focus
Proton beam irradiation
Quadrupole multiplet
Waveguides
Issue Date: 15-Apr-2011
Citation: Xiong, B.Q., Breese, M.B.H., Azimi, S., Ow, Y.S., Teo, E.J. (2011-04-15). Use of a line focus of a quadrupole multiplet for irradiating millimeter length lines. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 269 (8) : 729-732. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2011.02.002
Abstract: We have developed a new method of irradiation suitable for uniformly irradiating long, straight lines for waveguide and channel fabrication in semiconductors and polymers. This is achieved by exciting the quadrupole lenses of a nuclear microprobe in a manner such that the beam is focused in one plane but highly defocused in the orthogonal plane. This method requires no surface mask and since the beam is not scanned, it produces uniformly-irradiated patterns. This approach has been used for rapid exposure of lines 8 mm in length with widths of about 3 μm in silicon and 1.5 μm in polymethyl methacrylate. © 2011 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/98539
ISSN: 0168583X
DOI: 10.1016/j.nimb.2011.02.002
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