Selective electroless silver plating of three dimensional SU-8 microstructures on silicon for metamaterials applications

Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/97879

Title:	Selective electroless silver plating of three dimensional SU-8 microstructures on silicon for metamaterials applications
Authors:	Yan, Y. Ibnur Rashad, M. Teo, E.J. Tanoto, H. Teng, J. Bettiol, A.A.
Issue Date:	1-Dec-2011
Citation:	Yan, Y.,Ibnur Rashad, M.,Teo, E.J.,Tanoto, H.,Teng, J.,Bettiol, A.A. (2011-12-01). Selective electroless silver plating of three dimensional SU-8 microstructures on silicon for metamaterials applications. Optical Materials Express 1 (8) : 1548-1554. ScholarBank@NUS Repository.
Abstract:	We report a method for selective silver coating of SU-8 structures on Si substrates by treating the sample with radio frequency plasma prior to electroless plating. Silver films with high conductivity of 9 × 10-8Ω.m and low surface roughness of 9 nm have been obtained. When combined with two-photon lithography, this process can be utilized for three-dimensional metamaterials applications. Unlike previous work on selective coating, our process can coat directly on SU-8 photoresist that is widely used for two-photon lithography and does not require any resin modification. © 2011 Optical Society of America.
Source Title:	Optical Materials Express
URI:	http://scholarbank.nus.edu.sg/handle/10635/97879
ISSN:	21593930
Appears in Collections:	Staff Publications

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