Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/97879
Title: Selective electroless silver plating of three dimensional SU-8 microstructures on silicon for metamaterials applications
Authors: Yan, Y.
Ibnur Rashad, M.
Teo, E.J.
Tanoto, H.
Teng, J.
Bettiol, A.A. 
Issue Date: 1-Dec-2011
Source: Yan, Y.,Ibnur Rashad, M.,Teo, E.J.,Tanoto, H.,Teng, J.,Bettiol, A.A. (2011-12-01). Selective electroless silver plating of three dimensional SU-8 microstructures on silicon for metamaterials applications. Optical Materials Express 1 (8) : 1548-1554. ScholarBank@NUS Repository.
Abstract: We report a method for selective silver coating of SU-8 structures on Si substrates by treating the sample with radio frequency plasma prior to electroless plating. Silver films with high conductivity of 9 × 10-8Ω.m and low surface roughness of 9 nm have been obtained. When combined with two-photon lithography, this process can be utilized for three-dimensional metamaterials applications. Unlike previous work on selective coating, our process can coat directly on SU-8 photoresist that is widely used for two-photon lithography and does not require any resin modification. © 2011 Optical Society of America.
Source Title: Optical Materials Express
URI: http://scholarbank.nus.edu.sg/handle/10635/97879
ISSN: 21593930
Appears in Collections:Staff Publications

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