Proton beam writing of low-loss polymer optical waveguides

Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1606502

Title:	Proton beam writing of low-loss polymer optical waveguides
Authors:	Sum, T.C. Bettiol, A.A. Van Kan, J.A. Watt, F. Pun, E.Y.B. Tung, K.K.
Issue Date:	1-Sep-2003
Citation:	Sum, T.C., Bettiol, A.A., Van Kan, J.A., Watt, F., Pun, E.Y.B., Tung, K.K. (2003-09-01). Proton beam writing of low-loss polymer optical waveguides. Applied Physics Letters 83 (9) : 1707-1709. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1606502
Abstract:	A study was performed on proton beam writing of low-loss polymer optical waveguides. Low-loss channel waveguides in SU-8, a chemically amplified negative tone resist were fabricated. The results showed that waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits.
Source Title:	Applied Physics Letters
URI:	http://scholarbank.nus.edu.sg/handle/10635/97638
ISSN:	00036951
DOI:	10.1063/1.1606502
Appears in Collections:	Staff Publications

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