Please use this identifier to cite or link to this item: https://doi.org/10.1007/s00542-001-0139-5
Title: Nickel and copper electroplating of proton beam micromachined SU-8 resist
Authors: Van Kan, J.A. 
Rajta, I. 
Ansari, K. 
Bettiol, A.A. 
Watt, F. 
Issue Date: Sep-2002
Source: Van Kan, J.A., Rajta, I., Ansari, K., Bettiol, A.A., Watt, F. (2002-09). Nickel and copper electroplating of proton beam micromachined SU-8 resist. Microsystem Technologies 8 (6) : 383-386. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-001-0139-5
Abstract: Proton beam micromachining (PBM) has been shown to be a powerful technique to produce three-dimensional (3D) high-aspect-ratio microstructures (Watt et al., 2000). Potential commercial applications of PBM, which is a fast direct write technique, will become feasible if the fabrication of metallic molds or stamps is realised. Metallic components can be produced by electroplating a master from a microstructure produced in resist. The production of high-aspect-ratio metallic stamps and molds requires a lithographic technique capable of producing smooth and near 90° sidewalls and a one to one conversion of a resist structure to a metallic microstructure. PBM is the only technique capable of producing high-aspect-ratio microstructures with sub-micron details via a direct write process. In PBM, SU-8 (Lorenz et al., 1997) resist structures are produced by exposing the SU-8 resist with a focused MeV proton beam followed by chemical development and a subsequent electroplating step using Ni or Cu. The data presented shows that PBM can successfully produce high-aspect-ratio, sub-micron sized smooth metallic structures with near 90° sidewall profiles.
Source Title: Microsystem Technologies
URI: http://scholarbank.nus.edu.sg/handle/10635/97323
ISSN: 09467076
DOI: 10.1007/s00542-001-0139-5
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