Please use this identifier to cite or link to this item:
|Title:||Nickel and copper electroplating of proton beam micromachined SU-8 resist|
|Authors:||Van Kan, J.A. |
|Citation:||Van Kan, J.A., Rajta, I., Ansari, K., Bettiol, A.A., Watt, F. (2002-09). Nickel and copper electroplating of proton beam micromachined SU-8 resist. Microsystem Technologies 8 (6) : 383-386. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-001-0139-5|
|Abstract:||Proton beam micromachining (PBM) has been shown to be a powerful technique to produce three-dimensional (3D) high-aspect-ratio microstructures (Watt et al., 2000). Potential commercial applications of PBM, which is a fast direct write technique, will become feasible if the fabrication of metallic molds or stamps is realised. Metallic components can be produced by electroplating a master from a microstructure produced in resist. The production of high-aspect-ratio metallic stamps and molds requires a lithographic technique capable of producing smooth and near 90° sidewalls and a one to one conversion of a resist structure to a metallic microstructure. PBM is the only technique capable of producing high-aspect-ratio microstructures with sub-micron details via a direct write process. In PBM, SU-8 (Lorenz et al., 1997) resist structures are produced by exposing the SU-8 resist with a focused MeV proton beam followed by chemical development and a subsequent electroplating step using Ni or Cu. The data presented shows that PBM can successfully produce high-aspect-ratio, sub-micron sized smooth metallic structures with near 90° sidewall profiles.|
|Source Title:||Microsystem Technologies|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Mar 20, 2019
WEB OF SCIENCETM
checked on Mar 5, 2019
checked on Mar 2, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.