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https://doi.org/10.1016/S0167-577X(03)00238-6
| Title: | Microstructural study on multilayer [FeTaN/TaN]5 films | Authors: | Zhan, Q. Yu, R. He, L. Li, D. Nie, H. Ong, C. |
Keywords: | Magnetic materials Microstructure Sputtering Thin films Transmission electron microscopy (TEM) |
Issue Date: | Aug-2003 | Citation: | Zhan, Q., Yu, R., He, L., Li, D., Nie, H., Ong, C. (2003-08). Microstructural study on multilayer [FeTaN/TaN]5 films. Materials Letters 57 (24-25) : 3904-3909. ScholarBank@NUS Repository. https://doi.org/10.1016/S0167-577X(03)00238-6 | Abstract: | The microstructure of [FeTaN/TaN]5 multilayer films has been investigated by transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) in cross section and plan view. Each layer shows a small surface roughening less than 1 nm. The FeTaN layers are composed of b.c.c. Fe with Ta incorporated substitutionally and N interstitially, denoted as Fe(Ta,N); while the TaN layers mainly consist of f.c.c. TaN phase. A 〈110〉 texture of Fe(Ta,N) has been formed in the FeTaN layers. The columnar grain structure is a typical feature in FeTaN layers. © 2003 Elsevier Science B.V. All rights reserved. | Source Title: | Materials Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/97207 | ISSN: | 0167577X | DOI: | 10.1016/S0167-577X(03)00238-6 |
| Appears in Collections: | Staff Publications |
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