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|Title:||Microstructural study on multilayer [FeTaN/TaN]5 films|
Transmission electron microscopy (TEM)
|Citation:||Zhan, Q., Yu, R., He, L., Li, D., Nie, H., Ong, C. (2003-08). Microstructural study on multilayer [FeTaN/TaN]5 films. Materials Letters 57 (24-25) : 3904-3909. ScholarBank@NUS Repository. https://doi.org/10.1016/S0167-577X(03)00238-6|
|Abstract:||The microstructure of [FeTaN/TaN]5 multilayer films has been investigated by transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) in cross section and plan view. Each layer shows a small surface roughening less than 1 nm. The FeTaN layers are composed of b.c.c. Fe with Ta incorporated substitutionally and N interstitially, denoted as Fe(Ta,N); while the TaN layers mainly consist of f.c.c. TaN phase. A 〈110〉 texture of Fe(Ta,N) has been formed in the FeTaN layers. The columnar grain structure is a typical feature in FeTaN layers. © 2003 Elsevier Science B.V. All rights reserved.|
|Source Title:||Materials Letters|
|Appears in Collections:||Staff Publications|
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