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|Title:||Mechanism of tantalum adhesion on SiLK™|
|Citation:||Hu, Y., Yang, S.-W., Chen, X.T., Lu, D., Feng, Y.P., Wu, P. (2005-09-19). Mechanism of tantalum adhesion on SiLK™. Applied Physics Letters 87 (12) : 1-3. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2051792|
|Abstract:||Tantalum adhesion on SiLK™ was investigated using first-principles method based on density functional theory. Phenylene groups were found to play a major role and the adjacent semi-benzene rings also contribute significantly to Ta adhesion on SiLK™. In addition, the degradation effects of H2 He reactive plasma clean on Ta adhesion on SiLK™ was investigated. Based on our findings, argon plasma treatment was suggested and implemented after reactive plasma cleaning process, which resulted in integration of SiLK™ with Cu up to seven metal layers. © 2005 American Institute of Physics.|
|Source Title:||Applied Physics Letters|
|Appears in Collections:||Staff Publications|
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