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|Title:||Effect of surface structures upon ultrathin film interference fringes|
|Authors:||Taijing, Lu |
|Source:||Taijing, Lu,Ogawa, Tomoya,Toyoda, Koichi,Wang, Zhenguo (1993). Effect of surface structures upon ultrathin film interference fringes. Journal of Materials Research 8 (9) : 2315-2318. ScholarBank@NUS Repository.|
|Abstract:||Effect of surface structures upon ultrathin film interference fringes generated from extremely thin films or epitaxial layers grown on semiconductor wafers has been studied. Since dark regions of fringes correspond to the places where the thin films are destroyed or absent, the fringes are investigated to detect uneven surfaces with undesired structures. Therefore, surface microstructures can be detected and characterized effectively by the modification of the fringes.|
|Source Title:||Journal of Materials Research|
|Appears in Collections:||Staff Publications|
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