Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/96342
Title: Effect of surface structures upon ultrathin film interference fringes
Authors: Taijing, Lu 
Ogawa, Tomoya
Toyoda, Koichi
Wang, Zhenguo
Issue Date: 1993
Source: Taijing, Lu,Ogawa, Tomoya,Toyoda, Koichi,Wang, Zhenguo (1993). Effect of surface structures upon ultrathin film interference fringes. Journal of Materials Research 8 (9) : 2315-2318. ScholarBank@NUS Repository.
Abstract: Effect of surface structures upon ultrathin film interference fringes generated from extremely thin films or epitaxial layers grown on semiconductor wafers has been studied. Since dark regions of fringes correspond to the places where the thin films are destroyed or absent, the fringes are investigated to detect uneven surfaces with undesired structures. Therefore, surface microstructures can be detected and characterized effectively by the modification of the fringes.
Source Title: Journal of Materials Research
URI: http://scholarbank.nus.edu.sg/handle/10635/96342
ISSN: 08842914
Appears in Collections:Staff Publications

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