Please use this identifier to cite or link to this item:
https://doi.org/10.1116/1.2429671
DC Field | Value | |
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dc.title | Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry | |
dc.contributor.author | Chanbasha, A.R. | |
dc.contributor.author | Wee, A.T.S. | |
dc.date.accessioned | 2014-10-16T09:20:23Z | |
dc.date.available | 2014-10-16T09:20:23Z | |
dc.date.issued | 2007 | |
dc.identifier.citation | Chanbasha, A.R., Wee, A.T.S. (2007). Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 (1) : 277-285. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2429671 | |
dc.identifier.issn | 10711023 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/96173 | |
dc.description.abstract | It is known that depth resolution can be improved by lowering the primary ion impact energy (Ep) and/or increasing the impact angle (θ) up to a critical θ, beyond which surface roughening ensues. However, lower Ep is accompanied by lower secondary ion yield, and for ultralow-energy Cs+ primary beam, a poorly focused beam. In this study, the authors subject a Ge delta-doped Si sample to ultralow-energy ( | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1116/1.2429671 | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | PHYSICS | |
dc.description.doi | 10.1116/1.2429671 | |
dc.description.sourcetitle | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | |
dc.description.volume | 25 | |
dc.description.issue | 1 | |
dc.description.page | 277-285 | |
dc.description.coden | JVTBD | |
dc.identifier.isiut | 000244512400051 | |
Appears in Collections: | Staff Publications |
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