A novel scanning electron microscope method for the investigation of charge trapping in insulators

Abstract

A new technique using a copper detector in a scanning electron microscope is introduced for the investigation of charging in insulators, and pure single-crystalline α-quartz samples are studied. The curve of charging rate varying with time is obtained, and the total charge trapped in the sample is accurately determined. Furthermore, the effects of electron-beam energy and current on charging are also examined. Our results suggest that electron-radiation-induced defects in the sample play major roles in the charge trapping. Details of the experimental setup are given.