Hydrogen desorption kinetics from the Si (1 - x)Ge x(100)-(2×1) surface

Abstract

The hydrogen desorption kinetics from the Si 1-xGe x(100)-(2×1) surface was discussed. It was observed that there were two desorption channels from mixed dimers. It was found that a kinetic model was used to show that reasonable thermal desorption spectra resulted from incorporating the channel into the mechanism for hydrogen desorption. Analysis shows that germanium dimers exert little influence upon the hydrogen desorption barriers of neighboring silicon or germanium dimers.