Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.280540
Title: Footing reduction in the organic bottom anti-reflective coating implementation
Authors: Ko, T.-M. 
Cheng, A.
Keywords: Computer simulation
Descrum
Footing
Organic barc
Photoresist
Planarization
Reflectivity
Resist profile
Sidewall angle
Swing curve
Issue Date: 1997
Citation: Ko, T.-M., Cheng, A. (1997). Footing reduction in the organic bottom anti-reflective coating implementation. Proceedings of SPIE - The International Society for Optical Engineering 3183 : 196-206. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280540
Abstract: During the implementation of organic bottom anti-reflective coating (BARC) for i-line 0.35 μn critical layer fabrication, footing was observed after the development of the photoresist due to the reduction of reflectivity by the organic BARC. Footing was undesirable since it created difficulties in the subsequent etching steps. Two methods were attempted to reduce the footings. One method was to increase the reflectivity of the substrates by changing the thickness of the organic BARC. Another method was to carry out a descrum process after the lithographic processes. The nominal thickness of organic BARC in the manufacturing process was 1520 Å with a reflectivity of less than 5%. However, by increasing the organic BARC thickness to 2000 Å and 2500 Å, the reflectivity of the polycide substrates were increased to 13% and 8%, respectively. Experimental results showed that the increased reflectivity indeed helped to reduce the amount of footings. In the case of 2000 Å organic BARC, the footing was almost completely gone. Since these two different values of thickness were the local maximum and minimum on the thickness vs. reflectivity curves, they provided relatively wide processing latitudes for manufacturing. For the descrum experiments to reduce the footings, the photoresist profiles were significantly thinned down laterally while the heights of the developed photoresist were only slightly affected. Unfortunately, the magnitudes of the footings remained unchanged. Therefore, the descrum process did not seem to help to resolve the footing problems in the implementation of organic BARC.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/91810
ISSN: 0277786X
DOI: 10.1117/12.280540
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

43
checked on Nov 2, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.