Nanoporous, ultralow-dielectric-constant fluoropolymer films from agglomerated and crosslinked hollow nanospheres of poly(pentafluorostyrene)-block-poly(divinylbenzene)

Abstract

The fabrication of crosslinked and nanostructured fluoropolymer films with ultralow-κ was investigated. Dried SiO2 particles of about 25 nm in diameter, trichloro(4-chloromethylphenyl) silane, and 20 mL absolutely dry THF were introduced into a two-necked flask. Gel permeation chromatography (GPC), using THF as the eluent, was performed on an HP 1047A refractive index detector. The nanoporous fluoropolymer films, with porosity contributions from the interstitial spaces between the nanospheres and the core voids of the hollow spheres, exhibited a κ as low as 1.7.