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https://doi.org/10.1016/j.tsf.2007.07.046
| Title: | Mechanical properties of gradient pulse biased amorphous carbon film | Authors: | Teo, E.H.T. Chua, D.H.C. Lee, M.L. Ee, C.L. Lee, C.K. Tay, B.K. |
Keywords: | Amorphous carbon Hardness Stress |
Issue Date: | 30-Jun-2008 | Citation: | Teo, E.H.T., Chua, D.H.C., Lee, M.L., Ee, C.L., Lee, C.K., Tay, B.K. (2008-06-30). Mechanical properties of gradient pulse biased amorphous carbon film. Thin Solid Films 516 (16) : 5364-5367. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2007.07.046 | Abstract: | A new method to prepare compositional amorphous carbon (a-C) film termed gradient pulse bias is presented. The a-C film prepared this way showed outstanding mechanical and excellent tribological properties. The hardness and reduced modulus of the film are calculated to be 66 GPa and 320 GPa respectively. A wear rate of 1.3 × 10- 8 mm3/N m and frictional coefficient of 0.1 was also recorded. The novel film is also compared with multilayered and single layer a-C film prepared using the same system. © 2007 Elsevier B.V. All rights reserved. | Source Title: | Thin Solid Films | URI: | http://scholarbank.nus.edu.sg/handle/10635/86527 | ISSN: | 00406090 | DOI: | 10.1016/j.tsf.2007.07.046 |
| Appears in Collections: | Staff Publications |
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