Pb(Zr0.52Ti0.48)O3 films grown on nickel substrate by pulsed laser deposition

Abstract

Pb(Zr0.52Ti0.48)O3 (PZT) thin films were produced on polished nickel substrates by pulsed laser deposition method (PLD). Crystalline structures of both PZT films were evaluated using X-ray diffraction (XRD). Near randomly oriented PZT/LNO films were obtained even under optimized deposition conditions. PZT film directly grown on nickel substrate exhibits rather poor ferroelectric performance. LaNi03(LNO) as underlayer significantly improved the ferroelectric properties of PZT films on nickel substrate. No significant effect of oxygen pressure on orientation of LNO films on nickel substrate. Rather rough surfaces of the PZT films were observed. Cross sectional examination revealed that the films grew in columnar grains. Mechanisms of film's micro structure development and effect on ferroelectric performance are discussed. Copyright © 2007 MS&T'07®.