X-pod: A small footprint multi-legged piezoelectric single-crystal unimorph-based actuator concept

Abstract

Multi-legged piezoelectric single-crystal actuators with small footprints using an X-pod approach, namely, the Tripod and Tetrapod, have been conceptualized, each leg being a unimorph driven by Pb(Zn 1/3Nb 2/3)O 3(67)%PbTiO 3 (PZN(67)%PT) single crystals of [110] L×[001] T cut. Both finite-element analysis and experimental investigations are carried out to evaluate the performance of the Tripod and Tetrapod actuators. When operated at 0.57kVmm 1, both actuators exhibit an axial displacement of nearly 60m. Blocking forces of about 10N and 14N are observed for the Tripod and the Tetrapod, respectively. The blocking forces are roughly doubled if the perfectly clamped condition is imposed for the legs at the pedestal end while the axial displacement is lowered marginally by 12%. In addition to small footprints, other attractive features of the actuators include greater flexibility to modify the leg geometry and their inclination to suit the application. © 2012 IOP Publishing Ltd.