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Title: Excimer laser-induced transformation in laser ablated Pb(Zr 0.52Ti 0.48)O 3 amorphous thin films
Authors: Zhu, T.J. 
Lu, L. 
Yao, L.Q.
Issue Date: 11-Dec-2004
Citation: Zhu, T.J., Lu, L., Yao, L.Q. (2004-12-11). Excimer laser-induced transformation in laser ablated Pb(Zr 0.52Ti 0.48)O 3 amorphous thin films. Philosophical Magazine 84 (35) : 3729-3739. ScholarBank@NUS Repository.
Abstract: Pb(Zr 0.52Ti 0.48)O 3 (PZT) amorphous thin films were deposited on Si substrates at room temperature and 573 K by pulsed laser deposition. The as-deposited films were subsequently annealed at various laser power densities using a KrF pulsed excimer laser irradiation to induce the phase transformation from amorphous to ferroelectric perovskite structure. Structural analysis shows the possibility of transformation from pyrochlore to perovskite transformation when irradiated above a laser power density of 1.4MW/cm 2, which is in agreement with the thermal simulation. The surface quality of the PZT films deposited on 573 K is remarkably superior to that deposited at room temperature due to the enhanced thin structure and composition homogeneity. Almost all the pyrochlore phase transformed into perovskite structure after annealing at 2.8MW/cm 2 for 120s for both PZT films deposited at room temperature and 573 K, respectively. P-E hysteresis measurement of the laser-treated PZT shows relatively low remnant polarization P r of about 1.2μC/cm 2.
Source Title: Philosophical Magazine
ISSN: 14786435
DOI: 10.1080/14786430412331300154
Appears in Collections:Staff Publications

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