Please use this identifier to cite or link to this item: https://doi.org/10.1142/S0218194005002129
Title: Dynamic behavior of high-g mems accelerometer incorporated with novel micro flexures
Authors: Chen, B.
Miao, J.
Lim, C.
Tay, F.E.H. 
Iliescu, C.
Keywords: Accelerometer
Flexure
Interlapped-L
Rectangular
Issue Date: Apr-2005
Citation: Chen, B., Miao, J., Lim, C., Tay, F.E.H., Iliescu, C. (2005-04). Dynamic behavior of high-g mems accelerometer incorporated with novel micro flexures. International Journal of Software Engineering and Knowledge Engineering 15 (2) : 225-230. ScholarBank@NUS Repository. https://doi.org/10.1142/S0218194005002129
Abstract: In this work, a new MEMS accelerometer with large detectable range of more than 50 g is designed. Three types of flexure designs were studied: the conventional straight flexure, newly proposed interlapped-L flexure and rectangular flexure. Their dimensions were optimized to achieve the desired requirements of the accelerometer. Capacitive sensing method and electrostatic actuation are selected to be the sensing and actuation methods. Governing equations derived from this model are used to compare with that of a second order spring-mass-damper system. These mathematical models are then used to formulate the various types of sensitivities. Finite Element Analysis software ANSYS is used in the design stage to simulate its dynamic behavior. The accelerometers with interlapped-L flexure and rectangular flexure present very large detectable range of 60 g and 80 g, sensitivity of 23.1 and 17.3 fF/g, with the noise floor of 17.9 and 18.2 μg/(Hz) 1/2 in atmosphere. © World Scientific Publishing Company.
Source Title: International Journal of Software Engineering and Knowledge Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/85031
ISSN: 02181940
DOI: 10.1142/S0218194005002129
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