Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/84261
Title: Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y
Authors: Tan, C.F.
Lee, H.
Liu, J.P.
Quek, E.
Chan, L.
Chor, E.F. 
Issue Date: 2005
Citation: Tan, C.F.,Lee, H.,Liu, J.P.,Quek, E.,Chan, L.,Chor, E.F. (2005). Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y. Proceedings - Electrochemical Society PV 2005-05 : 554-561. ScholarBank@NUS Repository.
Abstract: We have demonstrated the application of a buried epitaxial Si 1-yC 1-y (y = 0.07) layer to suppress the end-of-range (EOR) defects related to low temperature RTA performed at 700°C for 30 s. The substitutional carbon was introduced epitaxially using low pressure chemical vapor deposition (LPCVD) followed by deposition of a silicon capping layer. The cross sectional transmission electron microscope (XTEM) images of the fabricated gated diodes revealed a substantial elimination of the EOR defects in the device with the buried carbon layers. The leakage characteristics of the device with carbon displayed leakage suppression of up to one order of magnitude. Further measurements on the temperature dependence of the junction leakage revealed a decrease in the activation energy of the generation current in the silicon device, which may be indicative of a higher defect density.
Source Title: Proceedings - Electrochemical Society
URI: http://scholarbank.nus.edu.sg/handle/10635/84261
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

20
checked on Sep 28, 2018

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.