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|Title:||Inversion-type surface channel In0.53Ga0.47As metal-oxide-semiconductor field-effect transistors with metal-gate/high-k dielectric stack and CMOS-compatible PdGe contacts|
|Citation:||Chin, H.-C.,Liu, X.,Tan, L.-S.,Yeo, Y.-C. (2009). Inversion-type surface channel In0.53Ga0.47As metal-oxide-semiconductor field-effect transistors with metal-gate/high-k dielectric stack and CMOS-compatible PdGe contacts. International Symposium on VLSI Technology, Systems, and Applications, Proceedings : 143-144. ScholarBank@NUS Repository. https://doi.org/10.1109/VTSA.2009.5159330|
|Abstract:||We report the first demonstration of a surface channel inversion-type In0.53Ga0.47As n-MOSFET featuring gold-free palladiumgermanium (PdGe) ohmic contacts and self-aligned S/D formed by silicon and phosphorus co-implantation. A gate stack comprising TaN/HfAlO/In 0.53Ga0.47As is also featured. Excellent transistor output characteristics with high drain current on/off ratio of 104, high peak electron mobility of 1420 cm2/Vs and peak transconductance of 142 mS/mm at gate length of 2 μm were demonstrated. In addition, the integration of low resistance PdGe ohmic contacts on In0.53Ga 0.47As alleviates contamination concerns associated with the common use of gold-based contacts on In0.53Ga0.47As. ©2009 IEEE.|
|Source Title:||International Symposium on VLSI Technology, Systems, and Applications, Proceedings|
|Appears in Collections:||Staff Publications|
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