FePt fct-(001) texture prepared at lower temperature for high areal density perpendicular recording media

Abstract

FePt thin films with face-centered-tetragonal (fct)-(001) texture has been prepared by magnetron sputtering at elevated temperatures from 350 °C to 450 °C. Cr100-x Rux underlayer was used to induce the FePtfct-(001) texture. The dependence of the texture on Ru content and substrate temperature is investigated. Cr lattice constant was expanded by addition of Ru, resulting in a bigger lattice mismatch between the Cr(200)-FePt(001) planes. Greater fct phase with c axis oriented perpendicular to the film plane has been achieved in films with Cr91 Ru9 underlayer. This result may arise from the strain-enhanced preferred orientation. The increase of substrate temperature favors the formation of fct-(001) texture. However, higher substrate temperature results in less fct phase formation. This may be caused by the diffusion of Cr from underlayer into magnetic layer.