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https://doi.org/10.1109/PGC.2010.5706006
| Title: | Dry etching of LiNbO3 using inductively coupled Plasma | Authors: | Deng, J. Si, G. Danner, A.J. |
Issue Date: | 2010 | Citation: | Deng, J.,Si, G.,Danner, A.J. (2010). Dry etching of LiNbO3 using inductively coupled Plasma. 2010 Photonics Global Conference, PGC 2010 : -. ScholarBank@NUS Repository. https://doi.org/10.1109/PGC.2010.5706006 | Abstract: | In this letter, we report ridge waveguides fabricated on X-cut proton exchange (PE)-LiNbO3 using inductively coupled plasma (ICP) etching techniques. Various etching masks and fluorine gases are investigated. Smooth etched surfaces are obtained by using Cr as a mask combined with SF 6/Ar etching gases. A high etch rate of 97.5 nm/min is achieved by using CHF3/Ar gases. Ridge waveguides with approximately 600nm depth, smooth surfaces and nearly vertical sidewalls are successfully fabricated using optimized etching conditions. | Source Title: | 2010 Photonics Global Conference, PGC 2010 | URI: | http://scholarbank.nus.edu.sg/handle/10635/83650 | ISBN: | 9781424498826 | DOI: | 10.1109/PGC.2010.5706006 |
| Appears in Collections: | Staff Publications |
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