Please use this identifier to cite or link to this item: https://doi.org/10.1109/TMAG.2002.802785
Title: Direct magnetic patterning of nonferromagnetic Co-C thin films by electron-beam radiation
Authors: Zhou, T.J.
Zhao, Y.
Wang, J.P. 
Chong, T.C. 
Thong, J.T.L. 
Keywords: CoC thin films
Electron-beam radiation
Magnetic phase change
Patterned magnetic nanostructure
Issue Date: Sep-2002
Citation: Zhou, T.J., Zhao, Y., Wang, J.P., Chong, T.C., Thong, J.T.L. (2002-09). Direct magnetic patterning of nonferromagnetic Co-C thin films by electron-beam radiation. IEEE Transactions on Magnetics 38 (5 I) : 1970-1972. ScholarBank@NUS Repository. https://doi.org/10.1109/TMAG.2002.802785
Abstract: Non-ferromagnetic Co-C thin films were magnetically patterned by electron-beam direct writing. Co50C50 films with thickness of 30-60 nm were prepared by alternately sputtering Co and C films onto C-buffered glass substrates. The as-deposited Co50C50 films are amorphous and nonferromagnetic. Magnetic patterning of the as-deposited Co50C50 film was realized by subjecting it to electron-beam radiation using a focused 30kev beam with a current of 6.6 nA and a dwell time per dot of 3.8 s and longer. The smallest magnetic dot diameter produced by a dwell time per dot of 3.8 s is about 270 nm. The magnetic dot diameter increases linearly with the square root of dwell time per dot, which implies that the magnetic dots are produced by heat-conduction-induced phase change in the film. The magnetic measurements show that the dots are magnetically soft. The present nanolithography is potentially a flexible alternative to fabricate patterned magnetic nanostructures for submicrometer magnetic devices.
Source Title: IEEE Transactions on Magnetics
URI: http://scholarbank.nus.edu.sg/handle/10635/83633
ISSN: 00189464
DOI: 10.1109/TMAG.2002.802785
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