Please use this identifier to cite or link to this item: https://doi.org/10.1109/IMWS-BIO.2013.6756159
Title: Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications
Authors: Zhang, S.
Lou, L.
Wang, T.
Tsang, W.M.
Kwong, D.-L.
Lee, C. 
Keywords: blood flow
flow sensor
intraocular pressure (IOP)
pressure sensor
Silicon nanowires (SiNWs)
Issue Date: 2013
Source: Zhang, S.,Lou, L.,Wang, T.,Tsang, W.M.,Kwong, D.-L.,Lee, C. (2013). Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications. 2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications, IMWS-BIO 2013 - Proceedings : -. ScholarBank@NUS Repository. https://doi.org/10.1109/IMWS-BIO.2013.6756159
Abstract: Various Nanoelectromechanical Systems (NEMS) sensors using piezoresistive silicon nanowires (SiNWs) as the sensing elements for pressure, strain and flow detection are reported. Measurement results reveal both excellent scalability and sensing stability for SiNWs based NEMS devices. Additionally, the new ultracompact pressure sensor with novel micro-grooved diaphragm structure is reported for low pressure range measurement, which leads to potential bio-medical applications. © 2013 IEEE.
Source Title: 2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications, IMWS-BIO 2013 - Proceedings
URI: http://scholarbank.nus.edu.sg/handle/10635/83546
DOI: 10.1109/IMWS-BIO.2013.6756159
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