Please use this identifier to cite or link to this item:
https://doi.org/10.1109/IMWS-BIO.2013.6756159
| Title: | Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications | Authors: | Zhang, S. Lou, L. Wang, T. Tsang, W.M. Kwong, D.-L. Lee, C. |
Keywords: | blood flow flow sensor intraocular pressure (IOP) pressure sensor Silicon nanowires (SiNWs) |
Issue Date: | 2013 | Citation: | Zhang, S.,Lou, L.,Wang, T.,Tsang, W.M.,Kwong, D.-L.,Lee, C. (2013). Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications. 2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications, IMWS-BIO 2013 - Proceedings : -. ScholarBank@NUS Repository. https://doi.org/10.1109/IMWS-BIO.2013.6756159 | Abstract: | Various Nanoelectromechanical Systems (NEMS) sensors using piezoresistive silicon nanowires (SiNWs) as the sensing elements for pressure, strain and flow detection are reported. Measurement results reveal both excellent scalability and sensing stability for SiNWs based NEMS devices. Additionally, the new ultracompact pressure sensor with novel micro-grooved diaphragm structure is reported for low pressure range measurement, which leads to potential bio-medical applications. © 2013 IEEE. | Source Title: | 2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications, IMWS-BIO 2013 - Proceedings | URI: | http://scholarbank.nus.edu.sg/handle/10635/83546 | DOI: | 10.1109/IMWS-BIO.2013.6756159 |
| Appears in Collections: | Staff Publications |
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