Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2011.6031040
Title: A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional
Authors: Koh, K.H.
Kobayashi, T.
Lee, C. 
Keywords: Mirror
Optical Microelectromechanical Systems
Piezoelectric Actuator
Issue Date: 2011
Citation: Koh, K.H.,Kobayashi, T.,Lee, C. (2011). A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional. International Conference on Optical MEMS and Nanophotonics : 41-42. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031040
Abstract: A novel actuation mechanism for a gold-coated MEMS mirror driven by 1x10 piezoelectric Pb(Zr, Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for 2-D raster scanning applications. © 2011 IEEE.
Source Title: International Conference on Optical MEMS and Nanophotonics
URI: http://scholarbank.nus.edu.sg/handle/10635/83320
ISBN: 9781457703362
ISSN: 21605033
DOI: 10.1109/OMEMS.2011.6031040
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