Please use this identifier to cite or link to this item:
https://doi.org/10.1109/OMEMS.2011.6031040
| Title: | A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional | Authors: | Koh, K.H. Kobayashi, T. Lee, C. |
Keywords: | Mirror Optical Microelectromechanical Systems Piezoelectric Actuator |
Issue Date: | 2011 | Citation: | Koh, K.H.,Kobayashi, T.,Lee, C. (2011). A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional. International Conference on Optical MEMS and Nanophotonics : 41-42. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031040 | Abstract: | A novel actuation mechanism for a gold-coated MEMS mirror driven by 1x10 piezoelectric Pb(Zr, Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for 2-D raster scanning applications. © 2011 IEEE. | Source Title: | International Conference on Optical MEMS and Nanophotonics | URI: | http://scholarbank.nus.edu.sg/handle/10635/83320 | ISBN: | 9781457703362 | ISSN: | 21605033 | DOI: | 10.1109/OMEMS.2011.6031040 |
| Appears in Collections: | Staff Publications |
Show full item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.